JPH01143122U - - Google Patents
Info
- Publication number
- JPH01143122U JPH01143122U JP3940188U JP3940188U JPH01143122U JP H01143122 U JPH01143122 U JP H01143122U JP 3940188 U JP3940188 U JP 3940188U JP 3940188 U JP3940188 U JP 3940188U JP H01143122 U JPH01143122 U JP H01143122U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- power source
- photoresist
- photolithography
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims 2
- 229920002120 photoresistant polymer Polymers 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 1
- 238000000206 photolithography Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3940188U JPH01143122U (en]) | 1988-03-25 | 1988-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3940188U JPH01143122U (en]) | 1988-03-25 | 1988-03-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01143122U true JPH01143122U (en]) | 1989-10-02 |
Family
ID=31265906
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3940188U Pending JPH01143122U (en]) | 1988-03-25 | 1988-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01143122U (en]) |
-
1988
- 1988-03-25 JP JP3940188U patent/JPH01143122U/ja active Pending